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TECHNOLOGY

microLED light source

microLED light source

microLED light source
Flat Display
Key issues

PM Method

Relatively large MiniLED light source is manufactured using conventional transfer method on PM-driven PCB
(issues raised with microLED light source size reduction and productivity)

AM Method

Manufacturing ultra-small & ultra-miniature microLED light source on AM-driven TFT backplane using challenging transfer process
(issues raised with the requirement of 100% light source electro-optic characteristic yield and defect countermeasure)

Differentiation Solution 01

Ultra-thin substrate processing technology and epitaxial die

Advantages of PM method

· Use of only measured and classified
  good quality light sources

· Use of already proven transfer technology

Advantages of AM method

· SSeparation of growth (supporting) substrate
  by LLO technology

Ultra-thin substrate processing technology

· MiniLED ultra downsizing

microLED light source

microLED
micro display
Key issues

Microdisplays are a core technology for metaverse devices, still under development with many technical obstacles.

Key issues

· 8" and larger large diameter RGB
 epitaxial wafer issues

· 8" and larger engineered monolithic
 epitaxial wafer issues

· Chip downsizing issues
  (performance degradation, manufacturing process complexity)

· Chip bonding issues

· RGB Color
  (Color Conversion or Blue-Green-Red
 array)

Differentiation Solution 02

Bonding-Comes-First-Device-Comes-Later Process

By using new material ceramics instead of opaque metal bonding layers, we provide solutions that address key technical issues

Differentiation Solution 03

microLED light source Foundry

WaveLord Inc. is the only SME in South Korea that can provide microLED light sources
by establishing fab & chip die process facilities in addition to GaN epitaxy facilities
▶ Provides microLED light source and foundry services to industry, academia and research institutes developing microLED displays

GaN Epitaxy House
(4", 6", 8")

microLED light source & Power Semiconductors

MOCVD : 3(K465i 2, HT-Crius 1)
Analysis equipment : XRD, PL(266nm), PL(375nm), Quick-EL, AFM, Normalski OM

microLED light source Foundry
(4", 8")

COW, COT, Epitaxy die , Engineered Monolithic epitaxial wafer

Fab : Photolitho Tools(Stepper, Aligner, Track) Plasma Etcher, CVD, PVD, RTA
Chip : Lapping, Polishing, Probe
Evaluation analysis : Microscope, SEM, Integrating sphere